5 pre/post screen deposit page parameters – INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

5.1.5 Pre/Post Screen Deposit Page Parameters

Figure 5-7 Material pre/post page

MATERIAL NUMBER . . . . . . . . . . . 1 to 6

Change the number to edit or create a different Material

NOTE: The first power ramp consisting of Pre-Cond Rise and Pre-Cond Soak is

skipped if the Idle power is nonzero.

PRECON RISE TIME. . . . . . . . . . . . 00:00 to 99:59 min:s

This parameter provides the time period over which the Source power is
ramped from 0 to Pre-Cond Soak Power. The default values is 00:00.

PRECON SOAK POWER . . . . . . . . 0.00 to 99.99%

This parameter is usually set to the power level at which the source material
just begins to glow. The Cygnus 2 ramps the power level from zero to Pre-Cond
Soak Power linearly over the time period Pre-Cond Rise Time. The default
value is 0. If set to a value greater than Maximum Power, Maximum Power has
priority.

PRECON SOAK TIME. . . . . . . . . . . 00:00 to 99:59 min:s

This parameter provides the time period for which the Cygnus 2 holds at
Precon Soak Power. The default value is 00:00.

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