INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 188)

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Cygnus 2 Operating Manual
9.4.30 Status Sensor
Command = SS <Command ID><Sensor>
Command ID = <Byte> See "Description" in Table 9-14 .
Sensor = <Byte> Sensor number (0 - 6)
If the Sensor number is zero the response will give the value for all six Sensors.
Response = See Data Returned in Table 9-14 .
Table 9-14 Status sensor
SS
Command
ID
Description
Number
of bytes
in the
response
Data Returned Notes
0
(0x00)
Crystal Life 1 or 6 <Byte> or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
One byte for each Sensor.
Range will be 0 - 100
1
(0x01)
Crystals
Remaining
1 or 6 <Byte> or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
One byte for each Sensor. Range between 0
and 12. Number of good crystals on a
CrystalTwo, Crystal6 or Crystal12 Sensor.
Returns either a 0 (current crystal failed) or a
1 (current crystal good) for a Single sensor.
The command is not intended to be used for
Generic sensor - returns NO_DATA .
2
(0x02)
Crystal
Position
1 or 6 <Byte> or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
One byte for each Sensor. Range between 1
and 12. The current crystal position on a
CrystalTwo, Crystal6 or Crystal12.
3
(0x03)
Sensor
Status
1 or 6 <Byte> or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
One byte for each Sensor.
Bit1 Bit 0
0 0 Good Crystal
0 1 Failed Crystal
1 0 Invalid Measurement
on Crystal
1 1 Undefined
Bit 7 Bit 6
0 0 Auto-Z-Ratio
0 1 Sensor Z-Ratio
1 0 Material Z-Ratio
1 1 Undefined
4
(0x04)
Fundamental
Frequency
8 or 48 <Long> or
<Long><Long><Long>
<Long><Long><Long>
One long integer for each Sensor.
Unconverted. To convert to Hz, multiply by
0.000873114913702011