INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 166)

9 - 18
IP
N 07
4-
54
5-
P1
E
Cygnus 2 Operating Manual
19
(0x13)
Rise Time 2
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
20
(0x14)
Soak Time 2
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
21
(0x15)
Auto Soak 2 0/ 1/ 0 Encode 0 = No
1 = Yes
22
(0x16)
Dep After Pre-Dep 0/ 1/ 1 Encode 0 = No
1 = Yes
23
(0x17)
Delay Option 0/ 3/ 0 Encode 0 = None, 1 = Shutter
2 = Control, 3 = Both
24
(0x18)
Control Delay Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time See Time Note
Gray font unless Delay
option is set to control
or both.
25
(0x19)
Shutter Delay Accur
(%)
1/ 99/ 5 Integer Gray font unless Delay
option is set to shutter
or both.
28
(0x1c)
Feed Power
(%)
0.0/ 99.99/
0.0
REAL_4X2
29
(0x1d
Feed Ramp Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time See Time Note
30
(0x1e)
Feed Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time See Time Note
31
(0x1f)
Idle Power
(%)
0.0/ 99.99/
0.0
REAL_4X2
32
(0x20)
Idle Ramp Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
33
(0x21)
Rate
(Å/s) 0/ 999.9/ 0 REAL_
4F31
Table 9-6 Material parameters (continued)
QM
&
UM
Cmnd
ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes