INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
* PreCond S/H Off XXX
Material #
0
6
0x54
* PreCond S/H On XXX
0x55
* Soak 1 Hold Off XXX
0x56
* Soak 1 Hold On XXX
0x57
* Soak 2 Hold Off XXX
0x58
* Soak 2 Hold On XXX
0x59
* Clock Hold Off
0x5A
* Clock Hold On
0x5B
* Start Inhbt Off **
0x5C
* Start Inhbt On **
0x5D
* Xtl Fl Inhbt Off
Sensor #
0
6
0x5E
* Xtl Fl Inhibt On
0x5F
* RWS Inhibit Off XXX
(RWS = RateWatcher Sample)
Material #
0
6
0x60
* RWS Inhibit On XXX
0x61
* RWS Init(iate) Off XXX
0x62
* RWS Initiate On XXX
0x63
Message On XXX See Note
Message #
1
10
0x64
Message Off XXX See Note
0x65
Note: There are ten User Messages available for the user to
construct. These messages can be displayed and cleared via logic
actions. User Messages are constructed on the General page
Message screen.
Note: * = Remote Comm and Logic will be independent. Methods
used to set action must be used to clear action.
** = Start Inhibit will carry through a power cycle
Table 9-11 Action list (continued)
Actions
Numeric
(Byte)
Min Max
Logic
Code