INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
IDLE
Sets the logic condition to be true at the beginning of the Idle state. The
condition remains true until the end of Idle. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
IN DEPOSIT
Sets the logic condition to be true at the beginning of the Deposit state and
includes Time-Power and Rate Ramps. It is also true while in Manual and the
Source/Substrate shutter output is active. The condition is cleared when
entering the post-deposit state, or when a STOP/RESET or a STOP/START
sequence is executed.
IDLE RAMP
Sets the logic condition to be true at the start of Idle Ramp. The condition
remains true until the end of Idle Ramp. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
ION ASSIST DEP
Sets the logic condition to be true at the start of Deposit if Ion Assist Deposit
has been enabled for this Material. The condition remains true until the end of
Deposit. The condition is also cleared when entering the Manual state, and
when a STOP/RESET or a STOP/START sequence is executed
XTAL LIFE > # ##
Sets the logic condition to be true whenever the Life value ## on Sensor # is
greater than the value entered for ##, which can be 1 to 99, for at least 5
seconds. The condition remains true until the Life value is less than ## for at
least 5 seconds. Numeric inputs for Sensor # range from 0 through 6 (0 for any
Sensor).
MANUAL
Sets the logic condition to be true when the Manual state is entered. The
condition remains true until leaving the Manual state, and when a
STOP/RESET or a STOP/START sequence is executed.
MATERIAL ##
Sets the logic condition to be true whenever a Material ## is in the READY state
or when it is STARTed. The condition remains true until the Material is no longer
active. Values for ## range from 1 to 6.