12 query process material parameter, 13 update process material parameter – INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

9.4.12 Query Process Material Parameter

Command: QP <Command ID> <Process Number><Material Number>

Command ID = <Byte> See

Table 9-9

.

Process Number = <Byte> 1

Material Number = <Byte> 1 - 6

Response = <Integer> | <Float>

Type of response depends on command ID, see Data Type column in

Table 9-9

.

9.4.13 Update Process Material Parameter

Command = UP <Command ID> <Process Number><Material Number>
<Parameter Value>

Command ID = <Byte> See

Table 9-9

.

Process Number = <Byte> 1

Material Number = <Byte> 1 to 6

Parameter Value = <Integer> | <Float> Type of value depends on command ID,
see Data Type column in

Table 9-9

.

Response = None (Just header and trailer)

Table 9-9 Process material parameters

QP

&

UP

Cmnd

ID

Name

(Units)

Range:

Low Limit/

High Limit/

Default

Data Type

Notes

Update Restrictions

and Display Notes

2

(0x02)

(Final

Thickness)
Final Thick

(KÅ)

0.0/

999.999/

0.0

REAL_5F32

3

(0x03)

(Thickness Limit)

Thick Limit

(KÅ)

0.0/

999.999/

0.0

REAL_5F32

4

(0x04)

(Crucible)

Cruc

1/ 64/ 1

Integer

Update not allowed if

Material is running

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