12 query process material parameter, 13 update process material parameter – INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
9.4.12 Query Process Material Parameter
Command: QP <Command ID> <Process Number><Material Number>
Command ID = <Byte> See
Table 9-9
.
Process Number = <Byte> 1
Material Number = <Byte> 1 - 6
Response = <Integer> | <Float>
Type of response depends on command ID, see Data Type column in
9.4.13 Update Process Material Parameter
Command = UP <Command ID> <Process Number><Material Number>
<Parameter Value>
Command ID = <Byte> See
.
Process Number = <Byte> 1
Material Number = <Byte> 1 to 6
Parameter Value = <Integer> | <Float> Type of value depends on command ID,
see Data Type column in
Response = None (Just header and trailer)
Table 9-9 Process material parameters
QP
&
UP
Cmnd
ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type
Notes
Update Restrictions
and Display Notes
2
(0x02)
(Final
Thickness)
Final Thick
(KÅ)
0.0/
999.999/
0.0
REAL_5F32
3
(0x03)
(Thickness Limit)
Thick Limit
(KÅ)
0.0/
999.999/
0.0
REAL_5F32
4
(0x04)
(Crucible)
Cruc
1/ 64/ 1
Integer
Update not allowed if
Material is running