1 xtaltwo (crystaltwo) – INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

During a state of STOP, READY or IDLE.

When the designated Sensor fails during pre-deposit. (A Stop Material will
occur if the failure action is configured for Time Power.)

During deposition if the secondary crystal of a XtalTwo switch fails, or the last
good crystal of a XtalSix, Xtal12 or Generic fails. (In either case a
TIME-POWER, STOP Material, POST DEPOSIT, or STOP ALL will occur,
depending on the failure option chosen.)

A crystal switch can be manually executed via the front panel, handheld controller,
remote communications, or logic statements when the system is configured for a
multi-position sensor.

NOTE: When crystal switching with the handheld controller, the Cygnus 2 must be

on the Sensor Information screen and the cursor on the appropriate
Sensor number.

3.5.1.1 XtalTwo (CrystalTwo)

In the case of the XtalTwo (a Dual Sensor head with a 779-220-G1 or 779-220-G2
XTAL 2 Switch), the CrystalSwitch output must be wired so that it simultaneously
energizes the Pneumatic Shutter Actuator Control Valve which applies the air
pressure to actuate the dual sensor shutter mechanism and the RF relay in the
XTAL 2 Switch, exposing crystal #2 while covering crystal #1 and rerouting the RF
signal. This allows the dual sensor to be operated with only one oscillator kit and
requires only one Sensor connection at the Cygnus 2.

Power-up initialization is performed on a dual sensor to verify that the secondary
crystal is good.

If a crystal fail occurs while in Deposit, the Cygnus 2 will switch to the second
crystal and continue. The Failed Crystal list can be cleared while in Deposit by
pressing the F4 function key on the Sensor Information screen with the cursor
positioned on the appropriate Sensor number. While in Ready, the Failed Crystal
list can also be cleared by executing a crystal switch with the Hand held controller
or by pressing the Switch Crystal function key in the Sensor Information screen or
via communications command RG23 (Switch Sensor) see

section 9.4.31, Remote

General Action, on page 9-42

. A good crystal must be available to switch to in the

case of using the crystal switch method.

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