Chapter 1 introduction and specifications, 1 introduction, Chapter 1 – INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
Chapter 1
Introduction and Specifications
1.1 Introduction
The Cygnus
®
2 is a closed loop process controller designed for use primarily in
physical vapor deposition. The Cygnus 2 monitors and/or controls the rate and
thickness of the deposition of thin films. Deposition rate and thickness are inferred
from the frequency change induced by mass added to a quartz crystal. This
technique positions sensors in the path between or to the side of the source of the
vaporized material and the target substrate. The sensor incorporates an exposed
oscillating quartz crystal whose frequency decreases as material accumulates. The
change in frequency provides information to determine rate and thickness and to
continually control the evaporation power source. With user programmed time,
thickness and power limits and with desired rates and material characteristics, the
Cygnus 2 is capable of automatically controlling the process in a precise and
repeatable manner. User interaction is accomplished via the Cygnus 2 front panel
or remote communication and consists of selection or entry of parameters to define
the process.
A complete system consists of a main electronics unit also called the Cygnus 2,
sensor heads and a crystal interface unit (XIU) for each attached sensor. These
items are generally bundled at the factory and are also sold separately.
This Cygnus 2 Operating Manual provides user information for installing,
programming and operating the main electronics unit.
When reading the Cygnus 2 Operating Manual, please pay particular attention to
the Notes, Cautions, and Warnings found throughout the text. The Notes,
Cautions, and Warnings are defined in
.
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