5 source maintenance – INFICON Cygnus 2 Thin Film Deposition Controller User Manual

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Cygnus 2 Operating Manual

10.5 Source Maintenance

The Source Maintenance page allows toggling Source and Sensor shutters and
rotating the crucible indexer associated with a selected Material. Source power
may be manually adjusted using the hand-held controller.

The Cygnus 2 must be in Ready or Idle mode to Enable Source Maintenance and
it must be Disabled to exit back to normal operation. If in Manual mode, Stop must
be activated to Enable Source Maintenance.

Figure 10-1 Source maintenance page

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