INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 235)

13 - 19
IP
N 07
4-
54
5-
P1
E
Cygnus 2 Operating Manual
13.6.3 Troubleshooting Computer Communications
8. XtalSix, Xtal12, or Generic
crystal switch problem (does
not advance or not centered
in aperture) a. No relay or incorrect relay
output programmed Program relay
b. Loss of pneumatic supply,
or pressure is insufficient for
proper operation b. Ensure air supply is
regulated at 80-90 psi
c. Operation has been
impaired as a result of
material accumulation on
cover c. Clean material
accumulation as needed,
refer to XtalSix manual IPN
074-155 or Crystal12 manual
IPN 074-398-P1 for
maintenance
d. Improper alignment d. Realign as per instructions
in XtalSix manual IPN
074-155 or Crystal12 manual
IPN 074-398-P1
e. 0.0225" diameter orifice
not installed on the supply
side of solenoid valve
assembly e. Install orifice as shown in
the XtalSix manual IPN
074-155 or Crystal12 manual
IPN 074-398-P1
Table 13-7 Troubleshooting transducers/sensors (continued)
SYMPTOM CAUSE REMEDY
Table 13-8 Troubleshooting computer communications
SYMPTOM CAUSE REMEDY
1. Communications cannot
be established between the
host computer and the
Cygnus 2 a. Use RS-232 loopback and
Test RS-232 diagnostic
function to determine if
cause is Cygnus 2 or if
cause is RS-232 cable / host
computer. a. If cause is RS-232 cable /
host computer see
Cause/Remedy b and c. If cause
is Cygnus 2 contact INFICON
service department
b. Improper cable
connection b. Verify for correct cable wiring
as described in
section 2.3.2.5
on page 2-11 .
c. BAUD rate in host
computer not the same as
the Cygnus 2 c. Verify BAUD rate in the host's
applications program, verify
BAUD rate in the Cygnus 2
d. Incompatible protocols
being used d. Verify that the Cygnus 2
protocol: RS232, DATALOG,
matches host
2. Error code returned, See section 9.3.1.3 See section 9.3.1.3