INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
24
(0x18)
Clear Failed
Crystals X
<Byte>
Clears all failed crystals except the current crystal for the
requested Sensor. X = Sensor (1- 6)
25 (0x19)
Reserved for future use.
26
(0x1a)
Rotate head X
<Byte>
If the requested Sensor is a multi crystal sensor and the
Material for that Sensor is in Ready, Stop or all active
Materials are in Idle, the sensor head will rotate.
X = Sensor (1 - 6)
27
(0x1b)
Default all
Parameters
Sets all parameters except the communication
parameters to default values.
29
(0x1d)
Soak Hold Pre Con
on <Material >
<Byte>
Material Range is 0 - 6 (0 = All Materials)
30
(0x1e)
Soak Hold Pre Con
off <Material >
<Byte>
31 (0x1f)
Start Inhibit On
Disallows a Start command to be executed.
32 (0x20
Start Inhibit Off
Allows a Start command to be executed.
33
(0x21)
RateWatcher
Sampling Inhibit
On <Material >
<Byte>
Will immediately cause the Deposit state to leave
sampling and not return until turned off.
34
(0x22)
RateWatcher
Sampling Inhibit
Off <Material >
<Byte>
Allows the Deposit state to go into the RateWatcher
algorithm.
35
(0x23)
RateWatcher
Sample Initiate On
<Material >
<Byte>
Allows the Deposit state to enter RateWatcher sampling
36
(0x24)
RateWatcher
Sample Initiate Off
<Material >
<Byte>
Turns RateWatcher sampling off.
37
(0x25)
Clear Q and S
counts for Sensor
X
<Byte>
Clear Q and S counts for specified Sensor X
38
(0x26)
Name Material
<Material><Library
Entry>
<Byte><Byte>
Give Material number <Material> (1-6) the name
corresponding to Material entry <Library Entry> (0-254).
Library entries range from 0 (Ag) to 254 (ZrO
2
), with
numbers correcponding to the alphabetical listing in the
library. The density and Z-Ratio will be changed
accordingly.
Table 9-15 Remote general (continued)
RG
Command
ID
Meaning
Action Value
Notes