29 status material – INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
9.4.29 Status Material
Command = SL <Command ID><Material>
Command ID = <Byte> See “Description” in
Material = <Byte>Material number (0 – 6)
Material = 0 will return the status of six Materials. The response will include all
active Materials.
Response = See Data Returned in
Table 9-13 Status material
SL
Command
ID
Description
Number
of bytes
in the
response
Data Returned
Notes
0 (0x00)
N/A
1 (0x01)
Filtered Rate
4 or 24
<Float>
Å/S
2 (0x02)
Displayed Rate
4 or 24
<Float>
Å/S Averaged over one second
3
(0x03)
Source Power
Output
4 or 24
<Float>
%
4 (0x04)
Thickness
4 or 24
<Float>
incremented while the source or
substrate shutter is open as in
Deposit, KÅ
5
(0x05)
State
1 or 6
<Byte>or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
See encodes in
6 (0x06)
State Time
4 or 24
<Integer>
Seconds in the current state
7
(0x07)
Active Sensors
1 or 6
<Byte> or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
Active Sensors Byte is a six-bit word
where each bit represents a Sensor
Any bit set indicates a Sensor is active for the requested Material.
Bit 0 = Sensor 1, bit 1 = Sensor 2, thru bit 5 = Sensor 6.
8
(0x08)
Power Source
Number
1 or 6
<Byte> or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
Source number for the requested
Material.
9
(0x09)
Accumulated Layer
Time
4 or 24
<Integer>
Seconds since "Ready"