INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 187)

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Cygnus 2 Operating Manual
10
(0x0a)
Deposit Average
Rate
4 or 24 <Float> KÅ Based on Averaging Time
parameter. Only available when in a
control state.
11
(0x0b)
Deposit Average
Power
4 or 24 <Float> % Based on Averaging Time
parameter. Only available when in a
control state.
12 (0x0c) Raw Rate 4 or 24 <Float> Å/S
13
(0x0d)
One Minute
Averages for Rate
& Power
8 or 48 <Float><Float> Returns a 'No Data Error' if not
enough data to do a one minute
average of the rate or the power
14
(0x0e)
Rate Deviation /
power output trend
Varies
with # of
data
points
<Integer><Float>…
<Float>
Number of bytes in the response.
Average values from the operate
screen graph.
Format of each data point.
15
(0x0f)
State before Stop 1 or 6 <Byte> or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
See encodes in section 3.4 on page
3-23 . If not currently in Suspend, will
return "No Data Error"
16
(0x10)
Data Log 64 or 384 Multiple pieces of
information
See section 3.5.9 on page 3-35 for
order of data.
17
(0x11)
Data Log with Xtal
History
448
or
2,688
<Data Log + Crystal
data for 12 crystals
per Sensor>.
See section 3.5.9 on page 3-35 for
order of data. Length of response =
64 bytes Data Log +
384 bytes Xtal History
Xtal History = 32 bytes per crystal,
12 crystals in 6 Sensors =
32*12*6=2304 bytes
18
(0x12)
Cause of Stop 1 or 6 <Byte> or
<Byte><Byte><Byte>
<Byte><Byte><Byte>
See encodes in section 13.3 on
page 13-5 . If not currently in Stop,
"Data not available" error will be
returned.
Table 9-13 Status material (continued)
SL
Command
ID
Description
Number
of bytes
in the
response
Data Returned Notes