Chapter 4 sensor & source set-up, 1 sensor set-up introduction, 1 sensor display navigation – INFICON Cygnus 2 Thin Film Deposition Controller User Manual

Page 91: Chapter 4, Section 4

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Cygnus 2 Operating Manual

Chapter 4

Sensor & Source Set-Up

4.1 Sensor Set-Up Introduction

The basic Cygnus 2 has one sensor measurement board with two Sensor
channels, identified as CH1 and CH2 on the Cygnus 2 back panel and as
Sensor # 1 and Sensor # 2 on the display screens. Two more sensor measurement
boards can be added to support up to six sensors. The second sensor
measurement board will be installed in the next slot labeled CH3 and CH4 and the
associated sensors will be Sensor# 3 and Sensor# 4 etc. Each Sensor connection
requires an external oscillator (XIU) package.

Sensor Set-Up is initiated by moving the cursor to the Sensor heading on the Main
Menu and pressing MENU. To return to the Main Menu display, press MENU again.

4.1.1 Sensor Display Navigation

The Sensor Overview display, see

Figure 4-1

, shows the current configuration of

all six possible Sensors even if only one measurement board is installed.

To make changes, use the left/right cursor to move to the appropriate Sensor, then
press F1 Select Sensor to bring up that Sensor’s screen. See

Figure 4-2

.

Figure 4-1 Sensor overview

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