INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 144)

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Cygnus 2 Operating Manual
8.4 THEN Action Definitions
NOTE: The following are level outputs that once turned on will remain active until
turned off. This is true even if the Logic string is cleared.
START INHBT (ON/OFF) XTL FL INHB (ON/OFF)
RWS INHIBIT (ON/OFF) RWS INITIATE (ON/OFF)
SOAK 1 HOLD (ON/OFF) ## SOAK 2 HOLD (ON/OFF) ##
EXTERN OUT (ON/OFF) ## MESSAGE (ON/OFF) ##
CLOCK HOLD (ON/OFF) PRE COND S/H (ON/OFF)
CANCEL TIMER ## . . . . . . . . . . . . . 1 to 20
Deactivates the designated timer ## and resets it to zero.
CLEAR COUNTER ## . . . . . . . . . . . 1 to 20
Clears the designated counter ##.
CLOCK HOLD (ON/OFF) ## . . . . . . 0 (any Material) to 6
This feature controls the state timer during any non-rate control state. These
states include the pre-deposit states—Ready, Crucible Switch, PreCond Rise,
PreCond Soak, Rise 1, Soak 1, Rise 2, Soak 2—and the post-deposit state Idle
Ramp.
For the feature to be activated the state’s timer must be non-zero. If the
Cygnus 2 is in the Ready state and a Start command is executed while CLOCK
HOLD is active, the Cygnus 2 will progress to the first pre-deposit state with a
non-zero state time. If the Cygnus 2 is in the Crucible Switch state, waiting for
Turret Feedback Input, and CLOCK HOLD is activated, when the turret
positioned input is activated, the Cygnus 2 will progress to the next pre-deposit
state having a non-zero state time. The Cygnus 2 is prevented from continuing
state processing until the CLOCK HOLD action is turned OFF.
CONTINUE DEP ## . . . . . . . . . . . . . 0 (any Material) to 6
Maintains the designated Material ## in the Deposit state but does not zero the
thickness. This action cannot be done from a Ready, Idle, Stop, Crystal
Switching, or Crucible Switch state. If the crystal is failed, this action will put the
associated Source into the Time Power state if the previous state was
Non-Deposit Hold, otherwise it is not allowed.
EXTERN OUT (ON/OFF) ## . . . . . . 1 to 38
Designates a hardware output ## and places it into its ON or OFF state.
Outputs can be given names up to 15 characters long. Outputs are named in
the I/O Map display.