Chapter 5 material set-up, 1 introduction, Chapter 5 – INFICON Cygnus 2 Thin Film Deposition Controller User Manual

Page 99: Chapter 5, material set-up, Chap, For a det, 1 material overview page

Advertising
background image

5 - 1

IP

N 07

4-

54

5-

P1

E

Cygnus 2 Operating Manual

Chapter 5

Material Set-Up

5.1 Introduction

The Cygnus 2 can store definition parameters for up to 6 Materials. Any Material
that is to be used must be defined. Materials can be defined by referencing the
internal Material Library containing more than two hundred cataloged materials and
by completing a series of parameter entries at the front panel.

Material Set-Up is initiated by moving the cursor to the Material heading on the
Main Menu and pressing MENU. To return to the Main Menu screen, press MENU
again.

5.1.1 Material Overview Page

The Material Overview display, see

Figure 5-1

, shows all 6 available Materials.

Materials are initially shown as Material 1 to Material 6. Use the right arrow cursor
to move into the Material table.

Figure 5-1 Material overview display

With the cursor on one of the 6 Materials, press F1 Select Material. See

Figure 5-3

on page 5-3

. The screen changes to show the Material screen. To assign one of

the chemical formulas with its correct density and Z-Ratio values to this Material #,
move the cursor to the appropriate library display: Lib A-Hf, Lib Hf-Sc or Lib Sc-Z.

Advertising