At, see, Section 3.5.9.2 – INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
3.5.9.2 Page Format ASCII Example:
To USB Storage Device and/or RS-232 Protocol Dlog Page for Material #1.
DATE:
09/16/2010
TIME:
09:13
LAYER #:
1
MATERIAL NAME:
ONE
LAYER TIME:
01:02
DEPOSITION TIME:
01:02
THICKNESS:
2.504 kAng
AVE. AGG. RATE:
40.0 Ang/S
AVE. RATE DEV.:
0.0 Ang/S
ENDING POWER:
0.0 %
AVE. POWER:
0.0 %
WHERE NEXT:
Post Deposit
COMPLETION MODE:
NORMAL
If Datalog Xtal Info was set to Yes, Crystal History is also sent as shown:
Sensor number of the sensor used, Crystal number of crystal(s) used, labels and
values are sent in the order displayed below.
SENSOR 1
BEG.
END
BEG. END BEG. END
XTAL
FREQ.
FREQ. LIFE LIFE
ACT. ACT. STAB. QUAL.
1
5976244
5976243 0%
0%
187
189
0
0
3
5966388
5966388 0%
0%
331
328
0
0
5
5971051
5971051 0%
0%
669
674
00
If there is a minus sign in front of the Freq value, it indicates that this crystal failed
during the layer. The frequency value shown in that case is the last valid reading
obtained before the crystal failed.