INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 274)

Index - 2
IP
N 07
4-
54
5-
P1
E
Cygnus 2 Operating Manual
M
mass sensitivity 14-1
material
definition 3-20
dielectric 3-10
measured deposition rate 14-13
measurement sensor 4-1
mode hopping 14-7
ModeLock oscillator 14-9
multiple layer deposition 10-4
N
net mask 6-4
O
Open Loop Method 14-11
P
parameter
commands 9-10
request established 9-10
Parenthesis 8-5
period measurement technique 14-4
PID 5-4 , 14-11 , 14-12
power 14-12
process
error 14-13
Program Lock code 3-33
pulse accumulator 14-4
Q
Quality 5-8
quality rate control 14-5
quartz crystal 14-1 , 14-14
quasiharmonic 14-2 , 14-9
R
rate
filter time 5-15
rate deviation 5-8
rate set point 14-13
RateWatcher 3-31 , 5-17
reference oscillator 14-4
remote communication 9-1
Repair Service 1-6
resonance 14-6
Retry 9-1
RS-232 9-5
RS-232C 2-11 , 9-1
S
Sales and Customer Service 1-6
sensor
diagnosing problems 13-15
installation 2-1
type 3-25
serial communication 2-11
series resonance 14-8
Service Center 1-6
source
control 3-28 , 4-4
spreadsheet program 3-39
spurious shift 14-10
status code 9-11
Subnet mask 9-2
Suspend 3-25
T
TEST mode 6-7
test mode 3-32
THICKNESS EQUATION 6-2
thickness shear mode 14-2
thickness twist mode 14-2
Time-Power 3-24
tooling 10-2
turret
feedback 3-29
source 3-29
U
USB 12-1
W
windup 14-14
wire feed 5-13
wired remote 3-31
Z
Z-match equation 14-5
Z-ratio 3-11 , 5-3 , 10-1 , 10-3 , 14-9