INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 142)

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Cygnus 2 Operating Manual
RISE 2
Sets the logic condition to be true at the start of Rise Time 2. The condition
remains true until the end of Rise Time 2. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
SHUTTER DELAY
Sets the logic condition to be true at the start of Shutter Delay. The condition
remains true until the end of Shutter Delay. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
SHTTR DLY ERROR
Sets the logic condition to be true when a Shutter Delay Error condition occurs.
The condition remains true until a START or a RESET command is received.
SOAK 1
Sets the logic condition to be true at the start of Soak Time 1. The condition
remains true until the end of Soak Time 1. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
SOAK 2
Sets the logic condition to be true at the start of Soak Time 2. The condition
remains true until the end of Soak Time 2. The condition is also cleared when
entering the Manual state, and when a STOP/RESET or a STOP/START
sequence is executed.
STATEMENT ###
This Event can be used to test a logic statement transition and the appropriate
Action is taken when the statement designated becomes true. A true statement
is indicated by three small asterisks below the statement number. Numeric
inputs range from 1 through 100.
STOP
Sets the logic condition to be true as long as the Cygnus 2 is in Stop. The condition
remains true until a START or RESET command is received.
TEST
Sets the condition to be true when the Cygnus 2 is in TEST.
THICK LIMIT
Sets the logic condition to be true once the Thickness Limit is achieved while
in Deposit. The condition remains true until entering the IDLE state for that
Material or until a Zero Thickness or a STOP/RESET sequence is executed.