Index, Acoustic impedance 14-9, Active oscillator 14-6, 14-8 – INFICON Cygnus 2 Thin Film Deposition Controller User Manual

Page 273: Activity 3-12, Aerial mass density 14-10, Aggregate, Anharmonic 3-29, 14-2, 14-7, 14-9, Auto z 3-29, 10-1, Averaging time 5-15, Cable noise 2-6

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Index - 1

IP

N 07

4-

54

5-

P1

E

Cygnus 2 Operating Manual

Index

A

acoustic impedance

14-9

active oscillator

14-6

,

14-8

Activity

3-12

aerial mass density

14-10

aggregate

rate

5-14

anharmonic

3-29

,

14-2

,

14-7

,

14-9

unable to detect

3-30

AT

crystal

14-8

resonator

14-3

Auto Z

3-29

,

10-1

unable to

3-29

,

3-30

averaging time

5-15

C

cable noise

2-6

calibration

10-3

Checksum

9-8

CLEAR

3-1

,

6-4

,

6-8

Communications

network protocol

9-2

control

system

14-13

controller

gain

14-12

model

14-11

,

14-12

crucible

3-28

crystal

frequency spectrum

14-8

known, used

3-30

life

3-10

new

3-30

replacement

13-20

resonance frequency

3-28

resonance point

14-8

unknown, used

3-30

use history

3-35

Crystal12

3-27

CrystalSix

3-27

CrystalTwo

3-26

Customer Service

1-6

Customer Support

Return Material Authorization

1-6

D

DAC

2-8

,

4-7

data entry

3-1

datalog

3-36

Declaration Of Contamination

1-6

density

5-3

calibration

10-1

value

10-1

DTE

2-11

E

earth ground

1-4

,

2-4

electrode-to-quartz bond

14-3

electromagnetic interference

2-7

Error Code

9-9

evaporation source.

14-11

event condition

8-7

F

feed ramp

5-13

File Access Code

3-33

,

6-9

film-induced stress

14-11

fit, weighted least-square-exponential

14-12

Frequency Response Method

14-11

fundamental

3-29

,

14-7

,

14-8

,

14-9

H

Handheld Controller

3-31

hardware handshaking

9-5

I

I/O

7-1

,

8-1

IAE

14-13

idle ramp

5-13

Input/Relay module

2-9

integral time

14-13

IP Address

9-2

ISE

14-13

ITAE

14-14

L

Laplace transform

14-12

Lock Code

6-8

logic statement

8-1

,

8-17

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