INFICON Cygnus 2 Thin Film Deposition Controller User Manual
Page 179
9 - 31
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Cygnus 2 Operating Manual
Timer Minutes
(See Notes 2 &
3)
Timer #
1
20
Number of
minutes
00:00 99:59
0x69
0x97
Timer Seconds
(See Note 1)
Timer #
1
20
Time in
Tenths of
Seconds
0
999.9
0x6A
0x96
Count limit
Counter # 1
20
Counter
value
0
999
0x6B
0x95
Statement Logic
Statement
#
1
100
0x6C
0x94
Xtal Fail
Sensor #
0 = any
0
6
0x6D
0x93
Xtal Switching
Sensor #
0 = any
0
6
0x6E
0x92
Max Power
0x6F
0x91
Min Power
0x70
0x90
Not Used
0x71
0x8F
Not Used
0x72
0x8E
Ion Assist Dep
0x73
0x8D
Auto-Z Fail
Sensor #
0 = any
0
6
0x74
0x8C
Cruc Sw Fail
0x75
0x8B
Rate < 0.1
0x76
0x8A
Shutter Dly Error
0x77
0x89
Not Used
0x78
0x88
Not Used
0x79
0x87
Xtal Life > xxx
Sensor #
0 = any
0
6
% Life
1
99
0x7A
0x86
Xtal Activity <
xxx
Sensor #
0 = any
0
8
Activity
1
999
0x7B
0x85
Computer Cntrl
0x7C
0x84
Table 9-10 Event list (continued)
Events
1st
numeric
(1 Byte)
(XXX)
Min Max
2nd
numeric
(Integer)
(YYY)
Min
Max
Logic
Code
Logic
Code
Negated