INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 137)

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Cygnus 2 Operating Manual
Thick Limit, Time Limit, Material, Material End, Crystal Fail, Crystal Switching,
Max Power, Min Power, Backup Sensor In Use, Crucible Switch Fail, Rate < 0.1,
Auto-Z Fail, Ion-Assist, and Rate Deviation Error.
There cannot be two consecutive ONs in a statement. A ON B ON C is not allowed.
A ON B and C ON D is acceptable.
Neither the event preceding nor the event following the ON can have a NOT
function or a parenthesis. For example ~A ON B or A ON ~B is not allowed. Neither
is A ON (B and C) or (A and B) ON C.
The ON connector always takes precedence over the AND and OR operators no
matter where it appears in the statement. For example, A AND B ON C will be
evaluated as A AND (B ON C) not as (A AND B) ON C.
8.3 IF Event Definitions
If two or more Materials are active simultaneously, an Event condition is considered
TRUE if it is true for any Material (for example, if the first Material is in DEPOSIT
and the second Material is in PRE-DEPOSIT, both the DEPOSIT and the
PRE-DEPOSIT Events would be TRUE).
The presence (or absence) of an input’s leading edge detection on the transition
from high to low (or low to high) is used to evaluate the event condition. Inputs are
not re-evaluated if held level at either the high or low state.
IF events can be connected using logic connectors, refer to section 8.2.3, AND/OR
and ON Logic Connectors, on page 8-6 . IF events can be negated.
AUTO-Z FAIL #
Sets the logic condition to be true whenever an Auto-Z fail condition occurs on
Sensor #. The condition remains true until the Auto-Z Fail condition is cleared.
Numeric inputs for Sensor # range from 0 through 6 (0 for any Sensor).
COMPUTER CNTRL
Sets the logic condition to be true when a Set Logic Statement vvv (1 to 100)
command is received from the remote communications port. The logic
condition remains true until a Clear Logic Statement vvv command is received
from the remote communications port. See Remote Commands RG5 and RG6
(see
section 9.4.31, Remote General Action, on page 9-42 ).
COUNT LIMIT XX yyy (xx can be 1 to 20 and yyy can be 0 to 999)
Sets the logic condition to be true when the specified counter XX (1 to 20) has
reached the count number set by yyy (1 to 999). The condition remains true
until the specified counter is cleared using Clear Counter XX.