INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 73)

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Cygnus 2 Operating Manual
3.4 State Descriptions
Table 3-2 State descriptions
STATE CONDITION RELAY CONTACT
STATUS
REMOTE
COMM
ENCODES
Source
Shutter Sensor
Shutter
1. READY The Cygnus 2 will accept a START
command. Inactive Inactive 0
2. CRUCIBLE SWITCH
(Crucible Sw)
During this state, the crucible turret is
being moved from its current position to the
one called out for the given Material. If the
idle power of the Source in use is not zero
the power is set to zero before the crucible
position changes. Cygnus 2 advances to
next state when turret input goes low for
the programmed position or turret delay
has elapsed (depending on parameter
settings). Inactive Inactive 1
3. PRECON RISE Source power rises to Precondition power
level over the precondition rise time.
[PreCon Rise Time] Inactive Inactive 2
4. PRECON SOAK Source is maintained at precondition
power level for the precondition soak time.
[PreCon Soak Time, PreCon Soak Power] Inactive Inactive 3
5. RISE 1 Source is rising to Soak Power 1 level.
[Rise Time 1] Inactive Inactive 4
6. SOAK 1 Source is being maintained at Soak Power
1 level. [Soak Time 1, Soak Power 1] Inactive Inactive 5
7. RISE 2 Source is rising to Soak Power 2 level.
[Rise Time 2] Inactive Inactive 6
8. SOAK 2 Source is being maintained at Soak Power
2 level. [Soak Time 2, Soak Power 2] Inactive Inactive 7
9. SHUTTER DLY Rate is being controlled. Advances to
Deposit State once the Source is in Rate
Control within Shutter Delay Accuracy for 5
seconds. Inactive Active 8
10. DEPOSIT Rate control. [Rate, Final Thickness, PID
Control, Process Gain, Primary Time
Constant, System Dead Time] Active Active 9
11. RATE RAMP 1 Rate control, desired rate changing. [New
Rate 1, Start Ramp 1, Ramp Time 1] Active Active 10
12. RATE RAMP 2 Rate control, desired rate changing. [New
Rate 2, Start Ramp 2, Ramp Time 2] Active Active 11