6 material – INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
3.3.6 Material
This display is organized into eight sub pages accessible thru the Select Menu
described below.
See
for programming details and screen displays.
3.3.6.1 Overview Page
The Material Overview display, see
, shows all 6 available Materials.
Materials are initially shown as Material 1 to Material 6. Once a chemical formula
or other name has been assigned, that name will be shown. See
Material Definition, on page 5-2
Figure 3-10 Material overview page
3.3.6.2 Source Page
The Material Source page allows entering or editing Density, Z-Ratio, Crucible to
use, Control Loop type and associated control loop parameters. The operating
limits for Min. and Max Power are also defined here. If desired, a Recorder Output
(one of the unused standard six or optional additional six analog outputs) can be
selected for Filtered Rate, Thickness, Rate Deviation or Power and the full scale
Range value selected. See
section 5.1.3, Material Source Page Parameters, on
.