INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 115)

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Cygnus 2 Operating Manual
RAMP 1 TIME . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This value determines the time period over which to ramp the rate from the
original rate to New Rate 1. The default value is 00:00.
RAMP 2 RATE . . . . . . . . . . . . . . . . . 0.000 to 999.9 Å/s
Ramp 2 Rate is provided to effect a rate change while depositing a Material.
The aggregate rate is ramped linearly from the original Ramp 1 Rate setpoint
to the New Rate 2 value over the time interval Ramp 2 Time. It is allowed to
ramp to a higher or a lower rate. The default value is 0.0.
START RAMP 2 . . . . . . . . . . . . . . . . 0.000 to 999.9 kÅ
This value determines the thickness at which to begin Ramp 2 Rate. A value of
zero disables this feature. Start Ramp 2 thickness must be greater than Start
Ramp 1 thickness. Also, Ramp 2 Rate can not be started until the completion
of Ramp 1 Rate. If the thickness of Start Ramp 2 is exceeded while in Ramp 1
Rate, Ramp 2 Rate will begin immediately after Ramp 1 Rate The default value
is 0.
RAMP 2 TIME . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
This value is the time interval over which the rate is ramped linearly from New
Rate 1 to New Rate 2. The default value is 00:00.
5.2 Special Material Parameter Features
5.2.1 Skip Deposit
If the Final Thickness is set to 0.000 kÅ, the Cygnus 2 will skip the DEPOSIT State.
State processing will go directly to the post-Deposit parameter state from the last
pre-Deposit state.
5.2.2 RateWatcher™ Sample and Hold Feature
Two parameters, Ratewatcher Time and Ratewatcher Accuracy, define the Sample
and Hold feature. When enabled by selecting RateWatcher Option = Yes, this
feature periodically samples the deposition rate by automatically opening the
sensor shutter and exposing the sensor to the deposition source. The power is
adjusted so the actual rate is set to the desired rate. The sensor shutter is then
automatically closed and power is held constant at the adjusted level. A five second
time delay for thermal stabilization occurs between opening the shutter and taking
measurements. During this time, DELAY is displayed in the Cygnus 2 message
area.
The RateWatcher Sample phase uses the measured deposition rate to control the
source power. When the deposition rate meets the requirements of the
RateWatcher Accuracy parameter, the RateWatcher Acceptance Window Time is
started. If the rate falls out of the RateWatcher Accuracy requirement, the
RateWatcher Acceptance Time Interval is reset to zero.