INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 82)

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Cygnus 2 Operating Manual
3.5.5.1 Determining Soak Power with the Handheld Controller
The Handheld Controller is a useful tool that can be used to determine the
appropriate Soak Power levels. Below is an example of how a typical process Soak
1 and Soak 2 can be determined using the Handheld Controller.
Determining Soak 1
Use the Handheld Controller to slowly increase power, a few percent-per-minute.
Watch the rate until some rate increase is detected. Depending on the type of
source used, this may take several minutes. Once a non-zero rate is achieved, note
the current percent power. Use a percent or more lower than this for the Soak
Power 1 parameter.
Determining Soak 2
After ~30 - 60 seconds of Soak 1, using the Handheld Controller, again slowly
increase the power a percent at a time until the desired Deposition Rate is reached.
Use a percent or two less than this number for the Soak Power 2 parameter.
3.5.6 Test Mode
Test can be turned on or off in the General/Test display page. "Test" will be shown
in red while Test mode is active.
3.5.6.1 Standard or Time Compressed
This Cygnus 2 contains a software-controlled test mode which simulates actual
operation. In Time Compressed mode, all Material times are sped up so that a long
process can be simulated in one tenth of the time. The purpose of the test mode is
to verify basic operation and to demonstrate typical operation. The rate display
during test mode operation is:
[1]
Crystal fails are ignored in these test modes. Auto crystal switching is disabled. All
other relays and inputs operate normally.
3.5.6.2 Advanced Test
In Advanced Test mode, crystal fails are recognized and auto crystal switching is
enabled.
Rate Display
40
Density (gm/cc)
-------------------------------------- Tooling %
100
-------------------------  A sec   =