INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 86)

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Cygnus 2 Operating Manual
3.5.9.1 Datalog contents:
The following values make up the data in the datalog. The data is sent in ASCII
strings when the RS-232 port is set for data logging. The data is also saved as
ASCII strings in the datalog files. The ASCII strings are made up of the labels and
values in the following list. ASCII strings are CRLF (Carriage Return Line Feed)
terminated. When the data log is requested via the remote status Material
command SL16 # (no Crystal History) or SL17 # (with Crystal History), the values
are sent in the binary format only.
 Year (Integer)
 Month (Integer)
 Day (Integer)
 Hour (Integer)
 Minute (Integer)
 Material x (Integer)
 Material x (x is the Material number or, in data log files, the name if the name is
programmed)
 Material Time seconds (Integer)
 Deposit Time seconds (Integer)
 Ending Thickness kÅ (Float)
 Average Rate A/s (Float)
 Average Rate Deviation A/s (Float)
 Ending Power % (Float)
 Average Power % (Float)
 Where it goes next (Byte):
 0 = NonDeposit Control or NonDeposit Hold
 1 = Post Deposit
 2 = Stop
 Termination Reason (Byte) (Matches the "Cause of Stop" Remote encoding
comm, see
section 13.3, STOP messages, on page 13-5 :
 128 = Normal termination,
 127 = Manual Source shutter closing,
 Time Power Flag (Byte) (0 = No, 1 = Yes)
 Power Fail Flag (Byte) (0 = No, 1 = Yes)
 Power Fail Thickness kÅ (Float) (0 if not a power fail, otherwise the thickness
when the power was lost.)