INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 136)

MDC-260 DEPOSITION CONTROLLER
THEORY OF OPERATION 10-12
Sodium Na 0.97 1.84
Sodium Bromide NaBr 3.20 *
Sodium Chloride NaCl 2.17 5.62
Sodium Fluoride NaF 2.56 9.31
Sodium Nitrate NaNO
3
2.27 7.40
Strontium Sr 2.620 *
Strontium Fluoride SrF
2
4.28 12.15
Strontium Oxide SrO 4.99 17.08
Sulphur S 2.07 3.86
Tantalum Ta 16.60 33.70
Tantalum (IV) Oxide Ta
2
O
5
8.2 29.43
Tantalum Carbide TaC 13.90 *
Tantalum Nitride TaN 16.30 *
Tellurium Te 6.25 9.81
Tellurium Oxide TeO
2
5.99 10.24
Terbium Tb 8.27 13.38
Thallium Tl 11.85 5.70
Thallium Chloride TlCl 7.00 *
Thorium Th 11.69 18.24
Thorium Dioxide ThO
2
9.86 31.09
Tin Sn 7.30 12.20
Tin Oxide SnO
2
6.95 *
Tin Selenide SnSe 6.18 *
Tin Sulfide SnS 5.08 *
Tin Telluride SnTe 6.44 *
Titanium Ti 4.50 14.06
Titanium (IV) Oxide TiO
2
4.26 22.07
Titanium Boride TiB
2
4.50 *
Titanium Carbide TiC 4.93 *
Titanium Nitride TiN 5.43 *
Tungsten W 19.30 54.17
Tungsten Boride WB
2
10.77 *
Tungsten Carbide WC 15.60 58.48
Uranium U 18.70 37.10
Uranium Dioxide UO
2
10.97 30.87
Uranium Oxide U
4
O
9
10.97 25.38
Vanadium V 5.96 16.66
Vanadium Boride VB
2
5.10 *
Vanadium Carbide VC 5.77 *
Vanadium Dioxide VO
2
4.34 *
Vanadium Nitride VN 6.13 *
Ytterbium Yb 6.98 7.81
Ytterbium Oxide Yb
2
O
3
9.17 *
Yttrium Y 4.34 10.57
Yttrium Oxide Y
2
O
3
5.01 *