INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 175)

MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-37
16 = Deposit #3
17 = Ramp to feed
18 = Feed hold
19 = Ramp to idle
20 = Layer complete
21 = Process complete
22 = Process resume
Abort Process Errors 1 Bit 6 = Max Rate&Min Pwr
Bit 7 = Min Rate&Max Pwr
Alarm 1 Errors 1 Bit 0 = Action Setup Corrupted
Bit 1 =Output Setup Corrupted
Bit 2 = Input Setup Corrupted
Bit 3 = Crystal Fail, Process Halted
Bit 4 = Rate Establish Error
Bit 5 = Active Layer Corrupted
Bit 6 = Active Process Corrupted
Bit 7 = System Setup Corrupted
Alarm 2 Errors 1 Bit 1 = No Sensor Enabled for Material
Bit 2 = Halt Process Action
Bit 3 = Sound Alarm Action
Bit 4 = Rate Deviation Alarm
Bit 5 = Crystal Fail, Time Power Mode
Bit 6 = Sensor Fault
Bit 7 = Source Fault