INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 49)

MDC-260 DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-13
To enable the rate sample feature, set the Sample Dwell % parameter to the
percentage of time you wish the controller to sample the rate. Then set the
Sample Period parameter to adjust how often the rate is sampled. For example, a
Sample Period of 0:01:00 (one minute) and a Sample Dwell of 50% will sample
the rate for 30 seconds then close the sensor shutter for 30 seconds (assuming it is
depositing at the last measured rate). This cycle will repeat every one minute.
4.2.6.6 RATE DEVIATION ACTIONS
The MDC-260 provides three actions that can take place when rate deviation
reaches various levels of severity. Each action may be assigned to a rate
deviation amount (%). The assignable actions include an attention sound, an
alarm sound and a process abort. The attention and alarm sounds are momentarily
triggered meaning they will sound when the error is exceeded and clear when
within the limit. The process will abort when the “Rate Deviation Abort” level is
exceeded, or when the power is at the maximum or minimum power level.
4.2.7 PROCESS SETUP
The final step in the initial setup of the controller is to define the processes that
you wish to run. To define a process you should complete the following steps:
1. Select a blank process from the Select Process Screen. Please note that you
can also copy and modify a similar process to save time.
2. Enter a process name in the Define Process Screen.
3. Move the cursor onto the layer thickness parameter and enter the desired
thickness for the layer.
4. Select a material for the layer by moving the cursor onto the material column,
pressing the right arrow key, moving the cursor onto the desired material for
the layer and pressing the Enter key.
Repeat steps 3&4 until the process layers are complete.
4.2.8 STARTING A NEW PROCESS
To start a new process, the controller must be in the Process Ready State (You can
see the current state of the controller at the top-right corner of any Graph or Status
screen). To switch to the Process Ready State, press Abort then Reset. From the
Process Ready State, press the Start key, move the cursor onto the desired process
and press Start again to start the process. To start a process from a layer other
layer #1, press the left arrow key to move the cursor onto the Starting Layer
parameter, enter the desired layer number, move back to the desired process and
press Start again. Please note that you can also change the process Run Number
(provided for your documentation purposes) from the Start Process screen.
4.2.9 RESUMING A PROCESS FROM ABORT OR HALT
To resume an aborted process, first press the start key. A message will appear
asking you to press the start key again to resume the process. The process will
resume from the layer where the process was aborted starting in either the Rise to