INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 82)

MDC-260 DEPOSITION CONTROLLER
OPERATING THE MDC-260 5-4
5.6.1 MAIN RUN SCREEN
Figure 5-7 Main Run Screen
The Main Run Screen provides an easy-to-see display of the most critical
information.
• The Rate field refers to the rate measured by the active sensor.
• The Power field refers to the power of the active source.
• The Thickness field refers to the cumulative Thickness, as measured by
the current sensor
• The Layer field refers to the layer number within the active process.
• The Crystal Health field refers to the health of the active sensor.
• The Time-to-Go field refers to the estimated time remaining or the elapsed
time of the current state, layer, or process. Note that the number 7 key can
be used to toggle between the time modes.
5.6.2 SOURCE-SENSOR STATUS SCREEN
Figure 5-8 Source-Sensor Status Screen
The Source/Sensor Status screen displays the status of the two sensors and
sources including the crystal or pocket position, source power, crystal health, each
sensor's deposition rate and thickness or frequency. You select either sensor
thickness or frequency in the Edit Display Setup Menu by setting the Sensor
Status parameter. Active sources and the active sensors are indicated with a “*”
next to the number. A failed sensor/crystal is indicated by “--” in the Health field.
Sample Ag Process Ready
Source Pocket Power
1* 01 00.0%
2 -- 00.0%
Sensor Crystal Health Rate Thickness
1* 01 99% 00.0 0.000
2 -- 00% 00.0 0.000