INFICON MDC-260 Thin Film Deposition Controller User Manual
Mdc-260
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Table of contents
Document Outline
- Cover Page
- Title Page
- Trademarks
- Disclaimer
- Disclosure
- Copyright
- General Safety Warning
- Declaration Of Conformity
- Warranty
- SAFETY PRECAUTION AND PREPARATION FOR USE
- SAFETY TERMS AND SYMBOLS
- Table Of Contents
- GENERAL DESCRIPTION
- PURPOSE
- FEATURES
- AMPLE PROGRAM STORAGE
- DYNAMIC MEASUREMENT UPDATE RATE
- SUPERIOR COLOR GRAPHICS DISPLAY
- PROGRAM SECURITY
- DESIGNED FOR UNATTENDED OPERATION
- FAIL SAFE ABORTS
- ABORT STATUS RETENTION
- RUN COMPLETION ON CRYSTAL FAILURE
- POWERFUL SYSTEM INTERFACE
- POWER SUPPLY NOISE TOLERANCE
- INTERNATIONAL STANDARD POWER CONNECTOR
- SPECIFICATIONS
- ACCESSORIES
- FRONT PANEL DISPLAYS AND CONTROLS
- BENCH CHECKOUT & INSPECTION
- PROGRAMMING AND CONTROLLER SETUP
- OPERATING THE MDC-260
- SIGN-ON SCREEN
- STARTING A NEW PROCESS
- STARTING A NEW LAYER
- RESUMING AN ABORTED OR HALTED PROCESS
- GRAPH DISPLAYS
- STATUS DISPLAYS
- MODES
- STATES
- TROUBLE, ERROR AND WARNING MESSAGES
- DESCRIPTION
- MIN RATE&MAX POWER
- MAX RATE&MIN POWER
- SYSTEM SETUP MEMORY CORRUPTED
- PROCESS MEMORY CORRUPTED
- MATERIAL MEMORY CORRUPTED
- RATE EST. ERROR
- CRYSTAL FAILURE
- SOURCE FAULT
- SENSOR FAULT
- NO SENSORS ENABLED
- TIME POWER
- RATE DEV. ALARM
- ALARM ACTION
- CRYSTAL MARGINAL
- RATE DEV. ALERT
- MAX POWER ALERT
- MIN POWER ALERT
- ALERT ACTION
- XTAL FAIL SWITCH
- XTAL MRGN SWITCH
- RATE DEV. ATTEN
- MAXIMUM POWER
- MINIMUM POWER
- CHANGE POCKET...
- CHANGE CRYSTAL...
- ATTENTION ACTION
- PRESS START TO RESUME PROCESS
- DESCRIPTION
- TUNING THE MDC-260 CONTROL LOOP
- INPUT/OUTPUT CHARACTERISTICS
- CONTROLLER INSTALLATION
- SYSTEM INSTALLATION
- THEORY OF OPERATION
- COMPUTER INTERFACE
- GENERAL
- HOST API FUNCTIONS
- PROTOCOL
- DATA TYPES
- TRANSMISSION RECEIPT
- TRANSMITTING AND RECEIVEING MESSAGES
- INSTRUCTION SUMMARY
- INSTRUCTION DESCRIPTIONS
- Code #00: Remote Keypress Activation of Controller
- Code #01: Send System Information
- Code #02: Send Utility Parameters
- Code #03: Receive Utility Parameters
- Code #04: Not Supported
- Code #05: Not Supported
- Code #06: Send a Material
- Code #07: Receive a Material
- Code #09: Send Number of Undefined Layers
- Code #10: Send Process
- Code #11: Receive Process
- Code #12: Delete Process
- Code #13: Send Process Layer
- Code #14: Insert Process Layer
- Code #15: Replace Process Layer
- Code #16: Delete Process Layer
- Code #17: Send Process List
- Code #18: Send Source Setup
- Code #19: Receive Source Setup
- Code #20: Send Sensor Setup
- Code #21: Receive Sensor Setup
- Code #22: Send Input Setup
- Code #23: Receive Input Setup
- Code #24: Send Output Setup
- Code #25: Receive Output Setup
- Code #26: Send Action Setup
- Code #27: Receive Action Setup
- Code #28: Send Controller Status
- Code #29: Start Process
- Code #30: Send Run-Time Values
- Code #31: Initiate Automatic Data Logging
- Code #32: Internal Command
- Code #33: Set Active Source Power
- Code #34: Internal Command
- Code #35: Internal Command
- Code #36: Not Supported
- Code #37: Not Supported
- Code #38: Remote Activation of Controller
- Code #39: Send a Run-Time Value
- Code #40: Enable/Disable the Front Panel Keyboard
- REPAIR AND MAINTENANCE
- APPENDIX A – MATING CABLE COLOR CODES
- APPENDIX B – PARAMETER TEMPLATES
- INDEX
- MENU MAPS