INFICON MDC-260 Thin Film Deposition Controller User Manual
Page 180
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MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE
11-42
35
Attention 2 Errors
1
Bit 1 = Sensor Calibration Done
Bit 2 = Not Sampling (Sample Mode)
Bit 3 = Manual Crystal Change
Bit 4 = Resume Process
Bit 5 = Sound Attention
Bit 6 = Manual Pocket Change
Bit 7 = Pause on Layer Complete
N/A
36
Controller Status 1
1
bit 0 = Ready Mode
bit 1 = Manual Mode
bit 2 = Time Power Mode
bit 3 = Hold Mode
bit 4 = Halt Mode
bit 5 = Abort Mode
bit 6 = Power Control Mode
bit 7 = In Process
N/A
37
Controller Status 2
1
bit 0 = Resume Process
bit 1 = Simulate Mode
bit 5 = Material Time Setpoint
bit 6 = Backup Sensor Active
bit 7 = Last Layer Of Process
Total: 103 Data Bytes
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