INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 27)

MDC-260 DEPOSITION CONTROLLER
FRONT PANEL DISPLAYS AND CONTROLS 2-1
2. FRONT PANEL DISPLAYS AND CONTROLS
Using the front panel is the most direct method of accessing the MDC-260. Both
the programmer and the operator will find it beneficial to become familiar with it.
2.1 GRAPHIC LCD DISPLAY
All programming and status information is shown through the central color LCD.
This section lists the available screens. These screens are grouped in three
distinctive areas: Programming screens, Graph screen, and Status screens. For
detailed descriptions of the different programming and status screens, refer to
Section 4 and 5.
2.1.1 PROGRAMMING SCREENS (MENUS)
Pressing the Program key at any time will cause the MDC-260 to return to the
main programming mode. In this mode, the user has the ability to make changes
to any parameter settings. Upon power up, the LCD display automatically reverts
to the last viewed status screen.
2.1.2 RUN-TIME GRAPHS
There are four graphs that may be displayed to show the progress of a deposition
process. Pressing the Graph key scrolls through the four available graphs: Rate,
Power, Thickness and Rate Deviation. The graphs automatically adjust the time
axis as the deposition proceeds.
2.1.3 STATUS SCREENS
Pressing the Status key scrolls through the four available screens of run-time data
(Status Screens). Each shows a different aspect of the current process. All of the
parameters are updated ten times per second unless the controller is in the Abort
mode.
2.1.3.1 MAIN RUN SCREEN
The Main Run Screen is a useful data screen which displays the most pertinent
run-time information in large, easy-to-read numbers. The data shown specifically
applies to the active Source/Sensor combination and the active process.
2.1.3.2 SOURCE/SENSOR STATUS SCREEN
The Source/Sensor Status Screen presents run-time data concerning both sources
and sensors. Also, from this view, the Pocket #, Sensor # or Crystal # may be
changed.
2.1.3.3 INPUT/OUTPUT STATUS SCREEN
The Input/Output Status Screen shows the state of all of the external inputs and
output.