Material, Material -2 – INFICON MDC-260 Thin Film Deposition Controller User Manual
Page 194
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MDC-260 DEPOSITION CONTROLLER
SYSTEM:
ENTERED BY:
APPROVED BY:
DATE:
14.1 MATERIAL
Material Number
Material Name
Sensor #
Crystal #
Source #
Pocket #
Density
Acoustic Impedance
Tooling Factor
Proportional Gain
Integral Time Constant
Derivative Time Constant
Rise to Soak Time
Soak Power
Soak Time
Rise to Predeposit Time
Predeposit Power
Predeposit Time
Rate Establish Time
Rate Establish Error
Deposition Rate 1
Deposition Rate 2
Deposition Rate 3
Rate Start Thickness 1
Rate Start Thickness 2
Rate Stop Thickness 1
Rate Stop Thickness 1
Time Setpoint
Ramp to Feed Time
Feed Power
Feed Time
Ramp to Idle Time
Idle Power
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