Source parameters, Utility setup parameter, Others – INFICON MDC-260 Thin Film Deposition Controller User Manual

Page 24: Source parameters -6, Utility setup parameter -6, Others -6

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MDC-260 DEPOSITION CONTROLLER

GENERAL DESCRIPTION

1-6

1.3.9 SOURCE

PARAMETERS

Number of Pockets

1 to 16

Shutter Relay Type

Normally open, normally closed, or
none.

Shutter Delay

0.0 to 9.9 sec

Position Control

Manual, direct, BCD, or individual

Position Drive

Up, down, Fast, inline, single step, or
double step

Feedback Type

Individual, BCD, single home, in
position, or no feedback

Rotator Delay

0 to 99 sec

Source Voltage Range

2.5, 5, 10 volts

1.3.10 UTILITY SETUP PARAMETER

Crystal Frequency

2.5, 3, 5, 6, 9, 10 MHz

Simulate Mode

On/Off

USB Interface Address

1 to 32

Attention Volume

0 to 10

Alert Volume

0 to 10

Alarm Volume

0 to 10

1.3.11 OTHERS

Input Power Requirements

100, 120, 200, 240 VAC; 50/60 Hz;
25 watts

Fuse Rating

IEC T-Type (Slow), 4/10 A, 250 V

Operating Temperature Range

0 to 50

°C

Physical Size

Rack-mount configuration (with ears)
10.4” wide x 3.5” high x 9.7” deep
Desktop configuration (with feet)
8.5” wide x 4.2” high x 9.7” deep

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