Source parameters, Utility setup parameter, Others – INFICON MDC-260 Thin Film Deposition Controller User Manual
Page 24: Source parameters -6, Utility setup parameter -6, Others -6
MDC-260 DEPOSITION CONTROLLER
GENERAL DESCRIPTION
1-6
1.3.9 SOURCE
PARAMETERS
Number of Pockets
1 to 16
Shutter Relay Type
Normally open, normally closed, or
none.
Shutter Delay
0.0 to 9.9 sec
Position Control
Manual, direct, BCD, or individual
Position Drive
Up, down, Fast, inline, single step, or
double step
Feedback Type
Individual, BCD, single home, in
position, or no feedback
Rotator Delay
0 to 99 sec
Source Voltage Range
2.5, 5, 10 volts
1.3.10 UTILITY SETUP PARAMETER
Crystal Frequency
2.5, 3, 5, 6, 9, 10 MHz
Simulate Mode
On/Off
USB Interface Address
1 to 32
Attention Volume
0 to 10
Alert Volume
0 to 10
Alarm Volume
0 to 10
1.3.11 OTHERS
Input Power Requirements
100, 120, 200, 240 VAC; 50/60 Hz;
25 watts
Fuse Rating
IEC T-Type (Slow), 4/10 A, 250 V
Operating Temperature Range
0 to 50
°C
Physical Size
Rack-mount configuration (with ears)
10.4” wide x 3.5” high x 9.7” deep
Desktop configuration (with feet)
8.5” wide x 4.2” high x 9.7” deep