INFICON MDC-260 Thin Film Deposition Controller User Manual

Page 75

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MDC-260 DEPOSITION CONTROLLER

PROGRAMMING AND CONTROLLER SETUP

4-39

appropriate output. The Inline drive type informs the controller that continuous
travel in one direction is not possible. Therefore to get from position 6 to 1, the
direction must be down through 5, 4, etc. until 1 is reached.

The controller creates one or more of the following outputs depending on the
type:

Drive Up

Drive Down

Step

6. Feedback Type (Individual, BCD, Single Home, In Position, No Feedback)

This parameter defines the type of feedback for a multiple pocket source. The
three feedback types available are as follows:

Individual - Individual position feedback. This feedback type uses one input
for each pocket position in the source. All inputs are normally false (open
circuit) unless the respective pocket is in position then that input is true
(closed to ground). For example, a six-pocket source would use six inputs. If
pocket two was in position then all the inputs would be false except the input
connected to feedback position number two.

BCD - Binary Coded Decimal position feedback. This feedback type
uses binary coding to indicate the pocket position. Inputs are numbered
most significant bit first. For example, an eight-pocket source would use
three inputs. With pocket one in position, all inputs would be false. With
pocket four in position, inputs one and two would be true and input three
would be false.

Pocket
Number

Input
BCD2

Input
BCD1

Input
BCD0

1 OPEN

OPEN

OPEN

2 OPEN

OPEN

GND

3 OPEN

GND

OPEN

4 OPEN

GND

GND

5 GND

OPEN

OPEN

6 GND

OPEN

GND

7 GND

GND

OPEN

8 GND

GND

GND


Table 4-2 Table of Input States for BCD Feedback Type

SNGL HOME - Single home position feedback. This feedback type uses one
input. The input is normally false (open circuit) and should go true (closed to
ground) when pocket one is in position.

IN POSITION - In position feedback. This feedback type uses one input.
The input is normally false (open circuit) and should go true (closed to
ground) when the desired pocket is in position.

NO FEEDBACK - No pocket position feedback is used.

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