INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 198)

MDC-260 DEPOSITION CONTROLLER
SYSTEM: ENTERED BY: APPROVED BY: DATE:
14.4 INPUTS
Input
#
Input Name True
Logic
Type Pin # Return
Pin #
1 LOW
HIGH
Passive
Active
2 LOW
HIGH
Passive
Active
3 LOW
HIGH
Passive
Active
4 LOW
HIGH
Passive
Active
5 LOW
HIGH
Passive
Active
6 LOW
HIGH
Passive
Active
7 LOW
HIGH
Passive
Active
8 LOW
HIGH
Passive
Active