INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 52)

MDC-260 DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-16
To select a material, move the cursors to the material parameter for that layer and
press the Right-arrow key. The Select Layer Material screen will be displayed as
shown below. Scroll to the desired material and press Enter.
The layer material defaults to 'End Layer' meaning this layer marks the end of the
process.
Figure 4-4 Select Layer Material Screen
4.3.2 VIEW/EDIT MATERIAL
From the Main Menu, selecting View/Edit Material will present the Select
Material screen shown below.
Figure 4-5 Select Material Screen
4.3.2.1 DEFINE A MATERIAL
Selecting a material for viewing and/or editing will present the screen which
permits the material to be defined, shows the first page of this screen. In this
screen, you define all of the material parameters for the selected material. The
material parameters are described in detail below.
Figure 4-6 Define Material Screen
Material Name: Cr ---------- Press >
Sensor 1
Crystal 01
Source 1
Pocket
01
Density 07.20 gm/cm^3
Acoustic Impedance 28.95 gm/cm^2/sec
Tooling Factor 100 %
↓
Select Layer Material 01 Cr ----------
02 Au
03
04
05
06
07
to select material 08
Select Material 01 Cr ----------
02 Au
03
04
05
1 - Copy
06
0 - Delete 07
- View/Edit 08