Status displays, Status, Displays -3 – INFICON MDC-260 Thin Film Deposition Controller User Manual

Page 81: Figure 5-4 rate deviation vs. time graph -3, Figure 5-5 thickness vs. time graph -3, Figure 5-6 power vs. time graph -3

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MDC-260 DEPOSITION CONTROLLER

OPERATING THE MDC-260

5-3

Figure 5-4 Rate Deviation vs. Time Graph

Figure 5-5 Thickness vs. Time Graph

Figure 5-6 Power vs. Time Graph

5.6 STATUS

DISPLAYS

There are five run-time status screens that can be displayed by pressing the Status
key (providing they have each been enabled in the Edit Display Setup menu).
However, only four screens are available at a time, depending on the controller’s
status. The first key press will bring up the last viewed status screen, repeatedly
pressing the Status key will cycle through four of the five status screens, shown
below.

Sample Cr Process Ready
5

Rate Dev%


1




5

Sample Cr Process Ready
999

Thickness






0 1

Sample Cr Process Ready
10

Power%






0 1

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