INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 80)

MDC-260 DEPOSITION CONTROLLER
OPERATING THE MDC-260 5-2
the condition of the system, and if everything appears to be in order, will start the
process.
If at this point an error message is presented by the LCD screen, it is likely that
there is a problem somewhere with either the system configuration and/or the
value of a system parameter which will prevent the process from running
correctly. Use the details of the error message as an indication of the corrective
action that should be taken. Refer to Section 5.9 for detail explanations of the
errors messages. Press the Abort key to abort the process start, then the Reset
key, and then make the necessary changes.
5.3 STARTING A NEW LAYER
The Start key is also used to start individual layers when the controller is set up
for manual layer sequencing. The controller will prompt the operator to press the
Start key to start the next layer.
5.4 RESUMING AN ABORTED OR HALTED PROCESS
The Start key is also used to resume an aborted or halted process. Pressing the
Start key while the controller is in abort or halt mode will bring up the following
prompt. Note that the green LED behind the Start key is illuminated, indicating
that the process can be resumed. Otherwise, the controller has to be reset, and the
process has to be started over.
Follow the prompt to resume the process.
5.5 GRAPH DISPLAYS
There are four different run time graph screens that can be displayed at any time
by pressing the Graph key (providing they have each been enabled in the Edit
Display Setup menu). The first key press will bring up the last viewed graph
screen, repeatedly pressing the Graph key will cycle through the four graph
screens, shown below.
Figure 5-3 Rate vs. Time Graph
Press Start to resume process
or Reset to cancel.
Sample Cr Process Ready
10
Rate
0 1
Displays the current
process name.
Displays the current
material name.
Displays the controller status.
Displays Graph’s Name