INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 33)

MDC-260 DEPOSITION CONTROLLER
BENCH CHECKOUT & INSPECTION 3-3
3.4.2 MATERIAL #2 PARAMETERS
Material Name Au
Sensor # 1
Crystal # 1
Source # 1
Pocket # 2
Density 19.30 gm/cm
3
Acoustic Impedance 23.18 gm/cm
2
sec
Tooling Factor 100 %
Proportional gain 5000
Integral Time constant 99.9 seconds
Derivative Time constant 0.00 seconds
Rise to Soak Time 0:00:05
Soak Power 25 %
Soak Time 0:00:05
Rise to Predeposit Time 0:00:05
Predeposit Power 37.5 %
Predeposit Time 0:00:10
Rate Establish Time 0 sec
Deposition Rate #1 20.0 Å/sec
Ramp #1 Start Thickness 100% (No Rate Ramps)
Time Setpoint 0:00:00
Ramp to Feed Time 0:00:05
Feed Power 10 %
Feed Time 0:00:10
Ramp to Idle Time 0
Idle Power 0
Maximum Power 50 %
Power Alarm Delay 5 seconds
Minimum Power 0 %
Rate Deviation Attention 0 %
Rate Deviation Alert 0 %
Rate Deviation Alarm 0 %
Sample Dwell % 100 % (Continuous Sampling)
Crystal Fail TimePwr
Backup Sensor # 1
Backup Crystal # 1
Backup Tooling Factor 100 %
Material Password 0000