INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 84)

MDC-260 DEPOSITION CONTROLLER
OPERATING THE MDC-260 5-6
The Position Control Screen is only available when the controller is in idle (not in
process or abort state). It allows the user to easily switch to a desired pocket or
crystal in order to replace the material or crystal.
To command a new pocket position, highlight the command field of the
corresponding source. Punch in the desired pocket number. Once the desired
pocket position is reached, it will be displayed in the Actual [position] field, if
feedback is provided.
Likewise, to command a new crystal position, highlight the command field of the
corresponding sensor. Punch in the desired crystal number. Once the desired
crystal position is reached, it will be displayed in the Actual [position] field, if
feedback is provided. The Crystal Health of that crystal will also be displayed in
the Health field.
5.7 MODES
Modes are conditions that the controller can occupy. Some modes are indicated
by the LED’s behind the operating keys. Other modes are displayed in the top
right hand corner of the status display (Refer to Figure 5-3). These controller
modes are described below.
5.7.1 PROCESS READY
The Process Ready Mode indicates the MDC-260 has been reset and is awaiting a
Start key press. The yellow LED behind the Reset key, when illuminated,
indicates that the controller is in Process Ready Mode.
5.7.2 ABORT
The Abort mode is indicated by a red LED behind the Abort key as well as the
flashing of all of the numeric LED displays. In Abort Mode all displays and
operating keys, with the exception of the Start and Reset keys, are inoperative.
All source control outputs are forced to zero, the Abort relay is closed and all
discrete outputs are forced to open circuit. In addition, if the controller initiated
the abort then the condition which caused the abort will be displayed in the top
right hand corner of the LCD display. Exit from Abort Mode requires either a
Reset or Start key press. See also Section 5.4 for resuming an aborted process.
Refer to Table 5-1 for conditions that can cause an abort.
5.7.3 HALT (SOFT ABORT)
In Halt all I/O is frozen. If power is above Soak level, it is ramped down to Soak
at the Predeposit ramp rate. If Power is at or below the Soak level it is held
constant. The user has the option to resume from Halt or press Reset and start
over. See also Section 5.4 for resuming a halted process. Refer to Table 5-1 for
conditions that can cause the process to halt.
5.7.4 IN PROCESS
The green LED behind the Start key indicates the controller is in the In-Process
Mode.