INFICON MDC-260 Thin Film Deposition Controller User Manual
Page 172
MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE
11-34
Response:
• In addition to the normal transmission receipt, the controller will respond
with:
Header
Interface
Address
Inst.
Code
Length
Action #N
(1-8)
25 Data
Bytes
Checksum
Dec
255 254
1
26
26
5 (data)
(checksum)
Hex
FF FE
01
1A
1A
05 (data)
(checksum)
(data):
The 25 data bytes represent the configuration parameters the selected
Action.
(checksum):
The checksum from the instruction code through the last data byte.
The action type defines the action that will be taken when the condition is
evaluated as true. The following table contains the list of possible actions.
Action Name
Action Type
No Action
1
Manual Power
2
Zero Thickness
3
Reset Process
4
Abort Process
5
Halt Process
6
Terminate Deposit
7
Hold In State
8
Step From State
9
Sound Attention
10
Sound Alert
11
Sound Alarm
12
Start Process
13
Select Process 1-8
14...21
Switch Crystals
22
Start Timer #1-8
23...30
Set Softnode #1-8
31...38