INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 68)

MDC-260 DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-32
Soft Node (1-8) - Each Soft node defaults to false but can be set to true by a "Set
Soft Node" Action. Soft nodes allow the user to link many action condition
strings together to trigger another action or output.
Sensor (1-2) - The sensor condition is evaluated true whenever the current sensor
equals the specified sensor.
Crystal (1-16) - The crystal condition is evaluated true whenever the current
crystal equals the specified crystal.
Layer (1-250) - The layer condition is evaluated true whenever the current layer#
equals the specified layer#.
Timer < (1-65,534 seconds) - The MDC-260 has eight internal counters that can
be used as conditions to trigger outputs or actions. The timer condition is
evaluated true whenever the timer's value is less than the value entered in the
timer condition. A timer can be reset to zero using a Start Timer Action. Once
reset, a timer will count up to its maximum value and stay there until it is reset
again. Timers are typically used to trigger an output for a set amount of time after
a certain event or state has occurred. For example, if you wanted to turn on an ion
gun for the first 3 minutes of deposition, you would first create an output called
"Ion Gun Power" with the condition "!Timer1<1&Timer1<181". This condition
says that this output will be true whenever Timer1 is greater than 1 and less than
181 seconds. The next step is to create an action to reset the timer in the state
before deposit. Select the "Start Timer #1" action and enter the conditions
"Predeposit Hold". The MDC-260 will continually reset timer #1 (set to zero)
while it is in the Predeposit Hold state then one second after it enters the deposit
state, the "Ion Gun Power" output will go true for 180 seconds or three minutes.
4.3.3.4 PROGRAM ACTIONS
The MDC-260 provides for 8 internal user programmable actions. Internal
actions are used to provide special functions at the true evaluation of a condition
string. These functions may be such things as terminating a deposit on an input
from an optical monitor. Or, sounding an alarm when certain events are true.
To program an action, first select the desired action from the list of eight
programmable actions displayed in the Actions screen.
Figure 4-14 Action Selection Screen
Select Action 01 Hold In State -----
02 Step From State
03 Sound Attention
04 Sound Alert
05 Sound Alarm
06 No Action
07 No Action
- View/Edit 08 No Action ↓