INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 174)

MDC-260 DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-36
Code #28: Send Controller Status
Description: Instructs the controller to send the controller status data list.
Format/Example:
• To instruct the controller to send the controller status data list, transmit:
Header Interface
Address
Instruction
Code
Length Checksum
Dec 255 254 1 28 0 228
Hex FF FE 01 1C 00 E4
Response:
• In addition to the normal transmission receipt, the controller will respond
with:
Header Interface
Address
Inst.
Code
Length 24 Data
Bytes
Checksum
Dec 255 254 1 28 24 (data) (checksum)
Hex FF FE 01 1C 18 (data) (checksum)
(data): The 24 data bytes represent the controller status data list.
(checksum): The checksum from the instruction code through the last data byte.
A description of the controller status data list is as follows:
Parameter Name Length
(bytes)
Values
Controller State 1 1 = Process ready
2 = Start layer
3 = Change pocket
4 = Change crystal
5 = Layer ready
6 = Soak rise
7 = Soak hold
8 = Rise to Predeposit
9 = Predeposit hold
10 = Establish rate
11 = Shutter Delay
12 = Deposit #1
13 = Rate ramp #1
14 = Deposit #2
15 = Rate ramp #2