INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 203)

MDC-260 DEPOSITION CONTROLLER
INDEX
15. INDEX
A
alpha characters, entering, 4-1
automatic crystal switching. See crystal
switching
C
contrast, 2-2, 4-3
control loop, tuning, 6-1
establishing control loop parameters,
6-3
copying and deleting, 4-2
Crystal
care and handling, 9-3
failure, 3-4, 10-5
health, 10-3, 10-5
replacement procedure, 9-3
switching, 4-12
temperature effect, 10-4
D
deposit state, 3-4, 4-20
display
Rate, 2-1
display setup, 4-10
E
empirical calibration, 10-6, 11-1, 11-2,
11-3, 11-5, 11-6
error messages, 5-7
F
front panel, 4-24, 8-1, 11-43
fuse
rating, 1-6
replacement, 8-2
G
getting started. See programming
sequence
graph displays, 5-2
graphics display, 1-1
ground lug, 8-3
grounding, iv, 8-1, 8-3
I
input, output and action setup, 4-9
input/output characteristics, 7-1
discrete inputs, 7-1
discrete outputs, 7-1
sensor input, 7-1
source control voltage output, 7-1
installation, controller, 8-1
external connections, 8-1
mounting, 8-1
proper grounding, 8-1
installation, system, 9-1
instrumentation feedthrough, 9-2
sensor head description, 9-1
sensor head installation, 9-1
typical system installation, 9-6
M
manual key. See manual operation
manual operation, 3-4
material setup, 4-11
menu structure. See navigating the menu
structure
messages
description, 5-8
modes, 5-6
abort, 5-6
halt (soft abort), 5-6
in process, 5-6
manual, 5-7
not sampling, 5-7
process complete, 5-7
process ready, 5-6
simulate, 5-7
N
navigating the menu structure, 4-1
number 7 key, 4-3, 4-24, 5-4