INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 86)

MDC-260 DEPOSITION CONTROLLER
OPERATING THE MDC-260 5-8
Warning
Messages Type Clear Action
Min Rate&Max Power Alarm Abort
Max Rate&Min Power Alarm Abort
System Setup memory corrupted Alarm Halt
Process memory corrupted Alarm Halt
Material memory corrupted Alarm Halt
Rate Est. Error Alarm Halt
Crystal Failure Alarm/Attn NO/* Halt
Source Fault Alarm Halt
Sensor Fault Alarm Halt
No Snsrs Enabled Alarm Halt
Time Power Alarm Time/Power
Rate Dev. Alarm Alarm *
Alarm Action Alarm
Crystal Marginal Alert/Attn NO/*
Rate Dev. Alert Alert *
Max power Alert Alert *
Min power Alert Alert *
Alert Action Alert *
Xtal Fail Switch Attention Crystal Switch
Xtal Mrgn Switch Attention Crystal Switch
Rate Dev. Atten Attention *
Max power Attention *
Min power Attention *
Change source # X to (material name)
and press Start to continue. Attention Hold
Change sensor # X to crystal # X
and press Start to continue. Attention Hold
Attention Action Attention *
Press Start to resume process. N/A
Start to continue. Attention * Hold
* Sound will clear when the condition clears.
Table 5-1 Trouble Conditions and Warnings
5.9.1 DESCRIPTION
The messages in the above table are described below.
5.9.1.1 MIN RATE&MAX POWER
This message indicates that the output power is at the maximum power level set
by the Maximum Power parameter and the rate deviation is below the limit value
set in the Rate Dev. Alarm parameter. When this happens, the controller will go
into the Abort mode and the Alarm will sound.