INFICON MDC-260 Thin Film Deposition Controller User Manual

Page 15

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11.5

TRANSMISSION

RECEIPT ........................................................................................ 11-8

11.6

TRANSMITTING

AND

RECEIVEING

MESSAGES ................................................. 11-8

11.7

INSTRUCTION

SUMMARY..................................................................................... 11-10

11.8

INSTRUCTION

DESCRIPTIONS ............................................................................. 11-11

Code #00: Remote Keypress Activation of Controller.......................................................... 11-11

Code #01: Send System Information..................................................................................... 11-12

Code #02: Send Utility Parameters...................................................................................... 11-13

Code #03: Receive Utility Parameters ................................................................................. 11-14

Code #04: Not Supported ..................................................................................................... 11-14

Code #05: Not Supported ..................................................................................................... 11-14

Code #06: Send a Material................................................................................................... 11-15

Code #07: Receive a Material .............................................................................................. 11-17

Code #09: Send Number of Undefined Layers ..................................................................... 11-18

Code #10: Send Process ....................................................................................................... 11-19

Code #11: Receive Process .................................................................................................. 11-20

Code #12: Delete Process .................................................................................................... 11-21

Code #13: Send Process Layer............................................................................................. 11-21

Code #14: Insert Process Layer ........................................................................................... 11-22

Code #15: Replace Process Layer........................................................................................ 11-23

Code #16: Delete Process Layer .......................................................................................... 11-24

Code #17: Send Process List ................................................................................................ 11-24

Code #18: Send Source Setup............................................................................................... 11-25

Code #19: Receive Source Setup .......................................................................................... 11-26

Code #20: Send Sensor Setup............................................................................................... 11-27

Code #21: Receive Sensor Setup .......................................................................................... 11-28

Code #22: Send Input Setup ................................................................................................. 11-29

Code #23: Receive Input Setup............................................................................................. 11-30

Code #24: Send Output Setup............................................................................................... 11-30

Code #25: Receive Output Setup .......................................................................................... 11-33

Code #26: Send Action Setup ............................................................................................... 11-33

Code #27: Receive Action Setup........................................................................................... 11-35

Code #28: Send Controller Status ........................................................................................ 11-36

Code #29: Start Process ....................................................................................................... 11-39

Code #30: Send Run-Time Values ........................................................................................ 11-39

Code #31: Initiate Automatic Data Logging ........................................................................ 11-43

Code #32: Internal Command .............................................................................................. 11-45

Code #33: Set Active Source Power ..................................................................................... 11-45

Code #34: Internal Command .............................................................................................. 11-45

Code #35: Internal Command .............................................................................................. 11-46

Code #36: Not Supported ..................................................................................................... 11-46

Code #37: Not Supported ..................................................................................................... 11-46

Code #38: Remote Activation of Controller ......................................................................... 11-46

Code #39: Send a Run-Time Value....................................................................................... 11-47

Code #40: Enable/Disable the Front Panel Keyboard......................................................... 11-48

12.

REPAIR AND MAINTENANCE .............................................................................. 12-1

12.1

HANDLING

PRECAUTIONS ..................................................................................... 12-1

12.2

MAINTENANCE

PHILOSOPHY................................................................................ 12-1

12.3

TROUBLE

SHOOTING

AIDS ..................................................................................... 12-1

12.4

RETURNING

THE

MDC-260

TO

THE

FACTORY .................................................... 12-3

13.

APPENDIX A – MATING CABLE COLOR CODES ............................................ 13-1

14.

APPENDIX B – PARAMETER TEMPLATES ....................................................... 14-1

14.1

MATERIAL.................................................................................................................. 14-2

14.2

PROCESS ..................................................................................................................... 14-4

14.3

DISPLAY

SETUP......................................................................................................... 14-5

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