INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 66)

MDC-260 DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-30
States - State conditions are evaluated true whenever the controller is in the
respective state. Controller States are:
• Process Ready
• Start Layer
• Change Pocket
• Change Crystal
• Layer Ready
• Soak Rise
• Soak Hold
• Predeposit Rise
• Predeposit Hold
• Establish Rate
• Deposit 1
• Rate Ramp 1
• Deposit 2
• Rate Ramp 2
• Deposit 3
• Ramp To Feed
• Feed
• Ramp To Idle
• Layer Complete
• Process Complete
• Process Resume
Events - Event conditions are evaluated true whenever the respective event is
true. Controller Events are:
• Abort
• Halt
• Hold
• Time Power
• Ready
• In Process
• Simulate